UV nanoimprint lithography and its application for nanodevices
Makoto Fukuhara*, Hiroshi Ono, Tamano Hirasawa, Makoto Otaguchi, Nobuji Sakai, Jun Mizuno, Shuichi Shoji
*この研究の対応する著者
研究成果: Article › 査読
12
被引用数
(Scopus)