UV/vapor-assisted hybrid bonding technology as a tool for future nanopackaging

Akitsu Shigetou*, Ajayan Mano, Jun Mizuno, Tadatomo Suga


研究成果: Conference contribution

3 被引用数 (Scopus)


Hybrid bonding of electrode metal, glass insulator, and organic substrate, by using a single UV/vapor-assisted method at low temperature and atmospheric pressure, is highly feasible and will be of practical use in three-dimensional hetero-integration of nanosystems onto flex substrates where the surfaces of electrode and insulation layer appear on the same plane. Given Cu, SiO 2, polyimide, and polydimethylsiloxane as the typical materials for a hybrid integration, the vapor and UV-assisted surface modification method was used to create a compatible bridging layer to diverse materials in a single process. Bridging layers, which are based on Cu hydroxide hydrate, silanol and hydroxyl groups from SiO2, polyimide and polydimethylsiloxane, respectively, could be prepared by introducing water molecules onto the clean surfaces created with Ar atom beam irradiation. The growth speed of the bridging layers on Cu, SiO2, and polyimide was tunable via the absolute humidity only. Based on the diffusion distance of Cu, an exposure of 8 g/m 3 was chosen as an optimum condition. Heating at 150°C after exposure to humidity caused tight adhesion between the mating surfaces for all combinations of Cu, SiO2, and polyimide. At the metal interface, a resistivity of around 4 × 108·m was obtained. Furthermore, the UV treatment in nitrogen gas, which was carried out to the initial surfaces of polydimethylsiloxane and Cu (with native oxide) films at atmospheric pressure, was found feasible in enhancing the generation of water adsorption sites without using vacuum processes.

ホスト出版物のタイトル2012 12th IEEE International Conference on Nanotechnology, NANO 2012
出版ステータスPublished - 2012 11月 22
イベント2012 12th IEEE International Conference on Nanotechnology, NANO 2012 - Birmingham, United Kingdom
継続期間: 2012 8月 202012 8月 23


名前Proceedings of the IEEE Conference on Nanotechnology


Conference2012 12th IEEE International Conference on Nanotechnology, NANO 2012
国/地域United Kingdom

ASJC Scopus subject areas

  • バイオエンジニアリング
  • 電子工学および電気工学
  • 材料化学
  • 凝縮系物理学


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