Vacuum ultraviolet (VUV) and vapor-combined surface modification for hybrid bonding at low temperature and atmospheric pressure

Akitsu Shigetou, Jun Mizuno, Shuichi Shoji

研究成果: Conference contribution

抄録

High feasibility of the vacuum ultraviolet (VUV) and vapor - combined surface modification method was demonstrated at the temperatures lower than 200 °C and atmospheric pressure, for the power/green electronic materials such as SiC (Si-related semiconductors), and GaN. Hybrid bonding of these materials will be of practical use in obtaining high reliability and performance in thin power devices. The water vapor, which was included in VUV irradiation atmosphere (N<inf>2</inf>) at the tuned amount of exposure ((g/m<sup>3</sup>)·s), helped generate hydrogen and hydroxyl radicals, then resulted in the elimination of surface contaminant, partial deoxidization of native oxide, and the formation of hydrate bridging layers at the same time. According to the change in the generation ratio of bridging layers, the exposure of 3 - 4 × 10<sup>3</sup> (g/m<sup>3</sup>)·s was chosen as a possible process window. Upon heating at 150 - 200 °C, the hydrogen bonds, which were followed by the dehydration inside the bridging layers, formed tight adhesion between the surfaces. Although the bond area was limited due to the partial contact at the touchdown, the interface did not contain readily visible voids.

本文言語English
ホスト出版物のタイトルICEP-IAAC 2015 - 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference
出版社Institute of Electrical and Electronics Engineers Inc.
ページ239-242
ページ数4
ISBN(印刷版)9784904090138
DOI
出版ステータスPublished - 2015 5 20
イベント2015 International Conference on Electronic Packaging and iMAPS All Asia Conference, ICEP-IAAC 2015 - Kyoto, Japan
継続期間: 2015 4 142015 4 17

Other

Other2015 International Conference on Electronic Packaging and iMAPS All Asia Conference, ICEP-IAAC 2015
CountryJapan
CityKyoto
Period15/4/1415/4/17

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

フィンガープリント 「Vacuum ultraviolet (VUV) and vapor-combined surface modification for hybrid bonding at low temperature and atmospheric pressure」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル