Variation of optical properties by the crystalline phase transition of polycrystalline silicon

Hidenori Iwata, Tomohiro Kita, Hirohito Yamada

研究成果: Conference contribution

抄録

We studied a characteristics trimming technique in Si photonic-wire waveguide devices. In order to trimming device properties, we utilized refractive index change of amorphous silicon when it crystallizes by annealing. We fabricated MZI devices with amorphous silicon waveguides, and demonstrated the trimming of the transmission spectra by thermal annealing and also laser annealing after finished the device fabrication process. We observed 5.2 % of the refractive index change owing to crystallization by annealing in a nitrogen atmosphere and 5.8% of change by laser crystallization.

本文言語English
ホスト出版物のタイトルSilicon Photonics VI
DOI
出版ステータスPublished - 2011 4 11
外部発表はい
イベントSilicon Photonics VI - San Francisco, CA, United States
継続期間: 2011 1 232011 1 26

出版物シリーズ

名前Proceedings of SPIE - The International Society for Optical Engineering
7943
ISSN(印刷版)0277-786X

Other

OtherSilicon Photonics VI
CountryUnited States
CitySan Francisco, CA
Period11/1/2311/1/26

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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