Velocity control of ozone beam

Tetsuya Nishiguchi*, Yoshiki Morikawa, Masaharu Miyamoto, Hidehiko Nonaka, Shingo Ichimura

*この研究の対応する著者

研究成果: Article査読

抄録

In order to obtain an active ozone beam and make full use of ozone oxidation ability, we used laser ablation method. High concentration ozone from an ozone jet generator was solidified on a sapphire substrate and then pulsed KrF laser was irradiated to the solid ozone. Ablated species and their velocity distribution have been investigated using time-of-flight method through a quadrupole mass filter. Ablated species were mainly a mixture of ozone, molecular oxygen and atomic oxygen. As for their velocity distribution, ozone showed a thermal equilibrium, while molecular oxygen showed many slower components. Ablated ozone yields were strongly dependent on laser power and showed a maximal. The ratio of ozone against molecular oxygen in the mixture increased as the substrate temperature became higher, probably because of increase in the purity of the solid ozone on the substrate. Ozone velocity varied from 1500 K to 2500 K depending on the laser power and the substrate temperature, which means that we can supply an ozone beam that has controlled purity and velocity.

本文言語English
ページ(範囲)201-204
ページ数4
ジャーナルShinku/Journal of the Vacuum Society of Japan
43
3
DOI
出版ステータスPublished - 2000
外部発表はい

ASJC Scopus subject areas

  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 電子工学および電気工学

フィンガープリント

「Velocity control of ozone beam」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル