Waveguide-integrated Si nano-photodiode with surface-plasmon antenna and its application to on-chip optical clock signal distribution

Junichi Fujikata, Koichi Nose, Jun Ushida, Kenichi Nishi, Masao Kinoshita, Takanori Shimizu, Toshihide Ueno, Daisuke Okamoto, Akiko Gomyo, Masayuki Mizuno, Tai Tsuchizawa, Toshifumi Watanabe, Koji Yamada, Seiichi Itabashi, Keishi Ohashi

研究成果: Conference contribution

4 被引用数 (Scopus)

抄録

We developed a waveguide-integrated Si nano-photodiode (PD) with a surface plasmon (SP) antenna for on-chip optical clock distribution. The interfacial periodic nano-scale metal-semiconductor-metal Schottky electrodes were shown to function as an SP optical antenna and also as an optical coupler between a SiON waveguide and a very thin Si-absorption layer. Furthermore, a very high speed response of 17 ps as well as enhanced photoresponsivity was achieved for a 10-μm coupling length. By using this technology, we fabricated a prototype of a large-scale-integration (LSI) on-chip optical clock system and demonstrated 5 GHz of optical clock circuit operation connected with a 4-branching H-tree structure.

本文言語English
ホスト出版物のタイトル2008 5th International Conference on Group IV Photonics, GFP
ページ176-178
ページ数3
DOI
出版ステータスPublished - 2008
外部発表はい
イベント2008 5th International Conference on Group IV Photonics, GFP - Sorrento, Italy
継続期間: 2008 9 172008 9 19

出版物シリーズ

名前2008 5th International Conference on Group IV Photonics, GFP

Conference

Conference2008 5th International Conference on Group IV Photonics, GFP
国/地域Italy
CitySorrento
Period08/9/1708/9/19

ASJC Scopus subject areas

  • 電子工学および電気工学
  • 電子材料、光学材料、および磁性材料

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