Wideband multimode transducer consisting of c-axis tilted ZnO/c-axis normal ZnO multilayer

Shinji Takayanagi, Takahiko Yanagitani, Mami Matsukawa

研究成果: Article査読

17 被引用数 (Scopus)

抄録

Wideband ultrasonic transducers are required for acoustic imaging and nondestructive evaluation. In this study, we have fabricated transducer consisting of c-axis tilted ZnO/c-axis normal ZnO multilayer on the Au(111)/Ti/silica glass substrate. We have investigated the crystalline orientations and frequency characteristics of the multilayer transducer. An X-ray diffraction analysis and a scanning electron microscopy analysis of the transducer revealed that the c-axis normal ZnO layer was grown on the Au(111) layer during the initial stage of ZnO layer deposition. As ZnO grain growth proceeded, c-axis normal growth change to the c-axis tilted ZnO layer growth. This multilayer transducer excited secondovertone modes of longitudinal and shear waves as well as the fundamental mode in the UHF range. Therefore, the frequency bandwidth of the multilayer transducer was broader than that of a single layer transducer consisting of a c-axis tilted ZnO layer.

本文言語English
論文番号07GC08
ジャーナルJapanese journal of applied physics
51
7 PART2
DOI
出版ステータスPublished - 2012 7
外部発表はい

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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