X-ray absorption spectroscopy on copper trace impurities on silicon wafers

Engineering & Materials Science

• X ray absorption spectroscopy 100%
• Silicon wafers 61%
• Impurities 48%
• Copper 41%
• X rays 26%
• Spectroscopy 24%
• Silicon 17%
• Cleaning 13%
• Photoelectron spectroscopy 12%
• Monolayers 9%
• Metals 9%
• Fluorescence 8%
• Water 7%
• Contamination 7%
• Semiconductor materials 6%
• Oxidation 6%
• Oxides 6%
• Geometry 4%
• Industry 3%

Physics & Astronomy

• absorption spectroscopy 46%
• wafers 37%
• copper 36%
• x ray absorption 33%
• impurities 33%
• silicon 27%
• x rays 22%
• contaminants 20%
• cleaning 20%
• spectroscopy 15%
• water 11%
• grazing incidence 10%
• metals 10%
• x ray spectroscopy 10%
• contamination 9%
• industries 8%
• photoelectron spectroscopy 8%
• fluorescence 7%
• oxidation 7%
• oxides 6%
• geometry 5%
• performance 4%

Chemical Compounds

• X Ray Absorption Spectroscopy 53%
• Spectroscopy 24%
• Surface 16%
• Trace Metal 14%
• Purity 12%
• Photoelectron Spectroscopy 12%
• Reaction Yield 10%
• Semiconductor 9%
• Monolayer 9%
• Industry 9%
• Fluorescence 7%
• Oxide 6%
• Oxidation Reaction 5%
• Metal 5%