Zig-zag ScAlN multilayer SMR for high power BAW fileter application such as RF base station

Yusuke Sato, Takahiko Yanagitani

研究成果: Conference contribution

抄録

RF filters for the base station require higher power durability than those for the mobile devices. Dielectric cavity resonator filters commonly used for the base station have high power durability, however the size of those filters is large. c-Axis zig-zag multilayer SMR is one of the solutions to this problem. In this study, we reported the c-axis zig-zag 12-layer ScAlN film stack on the Bragg reflector. c-Axis zig-zag ScAlN multilayer strcture was observed by scanning electron microscopy. The 12th quasi shear mode resonance excitation was clearly observed. We evaluated durability of multilayer and single layer.

本文言語English
ホスト出版物のタイトルIUS 2020 - International Ultrasonics Symposium, Proceedings
出版社IEEE Computer Society
ISBN(電子版)9781728154480
DOI
出版ステータスPublished - 2020 9 7
イベント2020 IEEE International Ultrasonics Symposium, IUS 2020 - Las Vegas, United States
継続期間: 2020 9 72020 9 11

出版物シリーズ

名前IEEE International Ultrasonics Symposium, IUS
2020-September
ISSN(印刷版)1948-5719
ISSN(電子版)1948-5727

Conference

Conference2020 IEEE International Ultrasonics Symposium, IUS 2020
CountryUnited States
CityLas Vegas
Period20/9/720/9/11

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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