ZnO: Ga-Based transparent conductive films: An attractive potential for use in flat panel display

Tetsuya Yamamoto, Takahiro Yamada, Toshiyuki Sakemi, Sho Shirakata, Minoru Osada, Seiichi Kishimoto, Kiyoshi Awai, Hisao Makino, Tooru Mitsunaga

研究成果: Conference contribution

4 被引用数 (Scopus)

抄録

The advantageous features of polycrystalline gallium (Ga)-doped ZnO (GZO) films, being cost-effective and easy to fabricate on a production scale, make them very attractive potential for use in transparent conductive electrode in flat display panel and thin film solar cells. In this work, GZO films have been prepared by reactive plasma deposition with non-traveling and traveling substrate mechanism. We have succeeded in fabricating 180 nm GZO films with low resistivity of 2.7 × 10-4 Ωcm and high transmittance more than 90 % in the visible wave length region on a glass substrate at temperature of 200 □ with a size up to 1m × 1m. On the basis of the analysis of data obtained by theoretical prediction and experimental study concerning micro-structural properties for GZO films, such as which sites Ga donors occupy, we have shown how to obtain electrical and optical properties required for application controlling the main process parameters, oxygen partial pressure.

本文言語English
ホスト出版物のタイトルCeramic Transactions
ページ475-489
ページ数15
196
出版ステータスPublished - 2006
外部発表はい
イベント6th Pacific Rim Conference on Ceramic and Glass Technology - Maui, Hawaii, United States
継続期間: 2005 9 112005 9 16

出版物シリーズ

名前Ceramic Transactions
196
ISSN(印刷版)10421122

Other

Other6th Pacific Rim Conference on Ceramic and Glass Technology
CountryUnited States
CityMaui, Hawaii
Period05/9/1105/9/16

ASJC Scopus subject areas

  • Ceramics and Composites

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